Projection Lithography (Lab Engineering, INDIA):
- 1X, 20X and 50X optical objects
- Precision X/Y stage having Mitutoyo digital readout on X/Y axis having ±2µm. accuracy and a least count of 1 µm.
- Stroke on X/Y axis 25mm
- Stage size 100mm x 100mm
- Stage movement on precision hardened and cross roller guides
- M plan Apo1X ultra long working distance objective
- Variable aperture and ND filters in optical path
