FESEM and EDS

FESEM (Tescan-Mira 3 LMH) and EDS (Bruker Quantax 200)

Technical Features:

  • 2X to 10,00,000X Magnification
  • High vacuum and low vacuum ( up to 500 Pa) imaging
  • IR camera for chamber view
  • Everhart-Thornley type detectors with YAG scintillators
  • Chamber SE detector, Resolution-1.2 nm at 30 kV (SE: Secondary electrons)
  • In-Beam SE detector,Resolution-1.0 nm at 30 kV
  • Pneumatic anti-vibration suspension system
  • Accelerating voltage- 50 V to 30 kV in steps of 10 V
  • Probe current 2 pA to 200 nA
  • Field of view- 6.4 mm at WD 10 mm and 20 mm at WD 30 mm
  • 20 ns to 10 ms per pixel scanning speed (Adjustable continuously)
  • Selectable image frame size up to 8192 X 8192 pixels
  • Point & line scan, image rotation & shift and tilt compensation
  • Sample stage movements : Motorized X,Y,Z = 80 mm, 60 mm, 47 mm respectively
    •               Rotation = 360 deg –motorized
    •                Tilt = -80o to +80o –motorized
  • Energy Dispersive X-ray Spectrometer (EDS)-having Peltier cooled Silicon drift detector (SDD)
  • Detection from Boron (5) to Americium (95)
  • Maximum input count Rate > 1000 kcps
  • 30 mm2 Active Area
  • Resolution <129 eV (MnKalpha)
  • ESPRIT Quant-automatic software tools for standardless quantitative spectra analysis
  • Image acquisition from SE source
  • Multi point, line scan and mapping (ultra fast digital elemental mapping with unlimited number of elements), histograms, binary and ternary charts

Sample requirement guidelines:

  1. The sample can be sent in the form of
    • Powder
      1. Amount of the sample: 1mg-5mg.
    • Thin film
      1. Dimension of the sample: 1.5*1.5cm2 to 2.0*2.0cm2
    • If the sample is a nanoparticle dispersion in a solvent, few drops can be deposited on a Conducting smooth substrate (e.g.: doped Si, doped Tin Oxide) & dried under vacuum may be provided for FESEM Analysis.
  2. The Magnification range should be between 10X-10000X